日本理音RION KS-93粒子傳感器
簡要描述：日本理音RION KS-93粒子傳感器Now capable of measuring 0.1 µm particles in semiconductor special material gases Simultaneous 5-channels particle measurement Rated flow rate:100mL/min, max.300 mL/min.
產品型號： KS-93
所屬分類：塵埃粒子計數(shù)器
更新時間：2024-08-12
詳細說明：
| 日本理音RION KS-93粒子傳感器 產地：日本 |
Now capable of measuring 0.1 µm particles in semiconductor special material gases
Simultaneous 5-channels particle measurement
Rated flow rate:100mL/min, max.300 mL/min.
Direct measurement of inert gas as well as corrosive, reactive and other gases
Realizes leak-tight, outgas-free conditions without dead space
Supports to SiH4, SiHCl3, HBr, NH3, PH3, HCl,etc.
< Specification > | Optical system | sideway light-scattering system | | Light source | Laser diode | | Particle size measurement ranges | 5 channels (0.1, 0.15, 0.2, 0.3, 0.5µm) | | Flow rate | 100 mL/min | | Max. Concentration | 30,000/min (counting loss within 5%) | | Dimensions and weight | Approx. 280(H) X 135(W) X 150(D) mm, Approx. 6.5 kg |
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